Material and growth mechanism studies of microcrystalline silicon deposited from SiF 4 /H 2 /Ar gas mixtures 1

Jean-Christophe Dornstetter, Junkang Wang, Bastien Bruneau, Erik V. Johnson, Pere Roca i Cabarrocas
  • Canadian Journal of Physics, July 2014, Canadian Science Publishing
  • DOI: 10.1139/cjp-2013-0606

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http://dx.doi.org/10.1139/cjp-2013-0606