Deposition and characterization of AlN thin films obtained by radio frequency reactive magnetron sputtering 1

  • M.V. Pelegrini, M.A. Alvarado, M.I. Alayo, I. Pereyra
  • Canadian Journal of Physics, July 2014, Canadian Science Publishing
  • DOI: 10.1139/cjp-2013-0556

The authors haven't yet claimed this publication.

Read Publication

http://dx.doi.org/10.1139/cjp-2013-0556