Chemical purity of diamond-like films produced by ion-beam deposition

S. A. Pshenichnyuk, Yu. M. Yumaguzin
  • Technical Physics, October 2001, Pleiades Publishing Ltd
  • DOI: 10.1134/1.1412068

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http://dx.doi.org/10.1134/1.1412068

The following have contributed to this page: Dr. Stanislav Pshenichnyuk