Infrared spectroscopy of bonded silicon wafers

A. G. Milekhin, C. Himcinschi, M. Friedrich, K. Hiller, M. Wiemer, T. Gessner, S. Schulze, D. R. T. Zahn
  • Semiconductors, November 2006, Pleiades Publishing Ltd
  • DOI: 10.1134/s1063782606110108
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The following have contributed to this page: Professor Dietrich RT Zahn