Infrared spectroscopy of bonded silicon wafers

A. G. Milekhin, C. Himcinschi, M. Friedrich, K. Hiller, M. Wiemer, T. Gessner, S. Schulze, D. R. T. Zahn
  • Semiconductors, November 2006, Pleiades Publishing Ltd
  • DOI: 10.1134/s1063782606110108

The authors haven't finished explaining this publication. If you are the author, sign in to claim or explain your work.

Read Publication

http://dx.doi.org/10.1134/s1063782606110108

The following have contributed to this page: Professor Dietrich RT Zahn