Development of capacitive RF MEMS switches with TaN and Ta 2 O 5 thin films

Anna Persano, Fabio Quaranta, Adriano Cola, Giorgio De Angelis, Romolo Marcelli, Pietro Siciliano
  • May 2011, SPIE
  • DOI: 10.1117/12.886715

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http://dx.doi.org/10.1117/12.886715

The following have contributed to this page: Dr Romolo Marcelli