Development of capillary z-pinch discharge EUV light source

Masato Watanabe, Tetsu Kasao, Mitsuo Okamoto, In Ho Song, Akitoshi Okino, Kazuhiko Horioka, Eiki Hotta
  • November 2003, SPIE
  • DOI: 10.1117/12.540550

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http://dx.doi.org/10.1117/12.540550

The following have contributed to this page: Professor Akitoshi Okino