What is it about?
This work focusses on the block process (instead of the spacer process) of the SADP. For the first time, we publish on the measured EPE, & compare with the modelled-EPE
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Why is it important?
we directly measure EPE rather than calculate (the latter is what had been pubished till todate)
Perspectives
EPE has recently been used in the patterning community. but its hard to get consistent dataset as it requires dealing with the integration complexity. We leverage consortia to do the work. This work focusses on SADP + SE block. Followup work focusses on SAQP+LE3 Block.
Mr Serge Biesemans
Read the Original
This page is a summary of: Analyzing block placement errors in SADP patterning, March 2016, SPIE,
DOI: 10.1117/12.2218597.
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