Wet release technology for bulk-silicon resonators fabrication on silicon-on-insulator substrate

Viviana Mulloni, Alessandro Faes, Benno Margesin
  • Journal of Micro/Nanolithography MEMS and MOEMS, November 2013, SPIE
  • DOI: 10.1117/1.jmm.12.4.041206

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http://dx.doi.org/10.1117/1.jmm.12.4.041206

The following have contributed to this page: Viviana Mulloni