Extreme-Ultraviolet Multilayer Mirror Performance: Recent Test Results

R. C. Catura, E. G. Joki, T. E. Whittemore, W. J. Brookover, M. S. Giampapa
  • May 1988, SPIE
  • DOI: 10.1117/12.943971

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http://dx.doi.org/10.1117/12.943971