A Study Of Porous Cordierite As A Potential Candidate For VLSI Dielectric Substrates

R G. Thompson, J Shyu, J C. Poret, C Buckhalt, D L. Shealy, H T. Tohver
  • May 1988, SPIE
  • DOI: 10.1117/12.943948

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http://dx.doi.org/10.1117/12.943948