Nondestructive Characterization Of MOCVD-Grown GaInAs/GaAs Using Rocking Curve And Topography

Chu R. Wie, H M. Kim, K M. Lau
  • May 1988, SPIE
  • DOI: 10.1117/12.943938

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http://dx.doi.org/10.1117/12.943938