Metalorganic Chemical Vapor Deposition Of InSb Using Tri-Neopentylindium

J C. Chen, W K. Chen, Pao-Lo Liu, J Maloney, O T. Beachley
  • May 1988, SPIE
  • DOI: 10.1117/12.943934

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http://dx.doi.org/10.1117/12.943934