Groove Profile Measurement Of Diffraction Gratings Using Scanning Electron Microscope

Tatsuo Herada, Eideki Taira, Toshiaki Kita, Masaaki Itou
  • February 1987, SPIE
  • DOI: 10.1117/12.941742

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http://dx.doi.org/10.1117/12.941742