Invited Paper Novel Chemistry For High Quality, Low Hydrogen PECVD Silicon Nitride Films

D. E. Ibbotson, C. P. Chang, D. L. Flamm, J. A. Mucha
  • April 1987, SPIE
  • DOI: 10.1117/12.941033

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http://dx.doi.org/10.1117/12.941033