Invited Paper Photochemical Cleaning And Epitaxy Of Si

Y. Nara, T. Yamazaki, T. Sugii, R. Sugino, T. Ito, H. Ishikawa
  • April 1987, SPIE
  • DOI: 10.1117/12.941030

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http://dx.doi.org/10.1117/12.941030