Formation And Nondestructive Characterization Of Ion Implanted Soi Layers

J. Narayan, M. El Ghor, S. Y. Kim, K. Vedam, R. Manukonda, S. J. Pennycook
  • April 1987, SPIE
  • DOI: 10.1117/12.941028

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http://dx.doi.org/10.1117/12.941028