Linewidth Control In Trilevel Etching

Avi Kornblit, Michael J. Grieco, Darryl W. Peters, Thomas E. Saunders
  • April 1987, SPIE
  • DOI: 10.1117/12.940441

The authors haven't yet claimed this publication.

Read Publication

http://dx.doi.org/10.1117/12.940441