Application Of Halogenated Polymethylstyrenes To X-Ray Resists

Tsuguo Yamaoka, Mitsunobu Koshiba, Yoichi Kamoshida, Hideo Takahashi, Yoshiyuki Harita
  • August 1987, SPIE
  • DOI: 10.1117/12.940330

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http://dx.doi.org/10.1117/12.940330