Effect Of Diffuse Reflectivity On Photoresist Linewidth Control

Stephen A. Casalnuovo, Clifford L. Renschler, Robyn E. Stiefeld, Bruce L. Draper, A.Roderick Mahoney
  • August 1987, SPIE
  • DOI: 10.1117/12.940320

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http://dx.doi.org/10.1117/12.940320