Langmuir-Blodgett Films For Half Micron Lithography Using Krf Excimer Laser And X-Ray

K. Ogawa, H. Tamura, M. Sasago, T. Ishihara
  • August 1987, SPIE
  • DOI: 10.1117/12.940306

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http://dx.doi.org/10.1117/12.940306