High quality factor dielectric multilayer structures fabricated by rf-sputtering

  • Alessandro Chiasera, Sreeramulu Valligatla, Stefano Varas, Nicola Bazzanella, D. Narayana Rao, Giancarlo C. Righini, Maurizio Ferrari
  • June 2012, SPIE
  • DOI: 10.1117/12.921695

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http://dx.doi.org/10.1117/12.921695

The following have contributed to this page: dr. Giancarlo C. Righini