Atomic layer deposition of iridium thin films and their application in gold electrodeposition

A. Szeghalmi, M. Arnold, A. Berger, N. Schammelt, K. Fuechsel, M. Knez, E. B. Kley, D. R. T. Zahn, A. Tuennermann
  • September 2011, SPIE
  • DOI: 10.1117/12.896818

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http://dx.doi.org/10.1117/12.896818

The following have contributed to this page: Professor Dietrich RT Zahn