Reflectivity-induced variation in implant layer lithography

Todd C. Bailey, Greg McIntyre, Bidan Zhang, Ryan P. Deschner, Sohan Mehta, Won Song, Hyung-Rae Lee, Yu Hue, MaryJane Brodsky
  • March 2008, SPIE
  • DOI: 10.1117/12.773102
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http://dx.doi.org/10.1117/12.773102

The following have contributed to this page: Mr. Sohan S Mehta