The rational design of polymeric EUV resist materials by QSPR modelling

  • Kevin Jack, Heping Liu, Idriss Blakey, David Hill, Wang Yueh, Heidi Cao, Michael Leeson, Greg Denbeaux, Justin Waterman, Andrew Whittaker
  • March 2007, SPIE
  • DOI: 10.1117/12.716213

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