Mask fabrication results using new laser writing system: Sigma7300

  • Ho-June Lee, Dong-Suk Nam, Sang-Hee Lee, Hyun-Soo Kim, Jung-Hoon Lee, Hak-Seung Han, Byung-Gook Kim, Seong-Woon Choi, Woo-Sung Han
  • May 2006, SPIE
  • DOI: 10.1117/12.681744

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http://dx.doi.org/10.1117/12.681744