RET for the wiring layer of a 3D memory

Yung-Tin Chen, Paul Poon, Chris Petti, Vishnu Kamat, Apo Sezginer, Hsu-Ting Huang
  • March 2006, SPIE
  • DOI: 10.1117/12.656725
The author haven't yet claimed this publicationThe author haven't yet claimed this publication