RET for the wiring layer of a 3D memory

Yung-Tin Chen, Paul Poon, Chris Petti, Vishnu Kamat, Apo Sezginer, Hsu-Ting Huang
  • March 2006, SPIE
  • DOI: 10.1117/12.656725

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http://dx.doi.org/10.1117/12.656725