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Key challenges in across-pitch 0.33-k 1 trench patterning using hybrid mask
Navab Singh, Moitreyee Mukherjee-Roy, Sohan S. Mehta, Hideki Suda, Takao Kubota, Yasuki Kimura, Hiroshi Kinoshita- May 2004, SPIE
- DOI: 10.1117/12.547729