Key challenges in across-pitch 0.33-k 1 trench patterning using hybrid mask

Navab Singh, Moitreyee Mukherjee-Roy, Sohan S. Mehta, Hideki Suda, Takao Kubota, Yasuki Kimura, Hiroshi Kinoshita
  • May 2004, SPIE
  • DOI: 10.1117/12.547729
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The following have contributed to this page: Mr. Sohan S Mehta