Patterning sub-50-nm Fin-FET using KrF lithography tool

Navab Singh, S. Jagar, Sohan S. Mehta, Moitreyee Mukherjee Roy, Rakesh Kumar, N. Balasubramanian
  • May 2004, SPIE
  • DOI: 10.1117/12.536040

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http://dx.doi.org/10.1117/12.536040

The following have contributed to this page: Mr. Sohan S Mehta