Impact of scattering bars in damascene trench patterning

Sohan S. Mehta, Navab Singh, Moitreyee Mukherjee-Roy, Rakesh Kumar
  • June 2003, SPIE
  • DOI: 10.1117/12.485377
The author haven't finished explaining this publicationThe author haven't finished explaining this publication
Read Publication

http://dx.doi.org/10.1117/12.485377

The following have contributed to this page: Mr. Sohan S Mehta