Nondestructive measurement of layer thickness in double heterostructures by x-ray double crystal diffraction

Yi Qu, Xueqian Li, Xiaowei Song, Xingde Zhang, Li-Ding Wang, Xiping Qie
  • February 1998, SPIE
  • DOI: 10.1117/12.300707

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http://dx.doi.org/10.1117/12.300707