Defect-free fabrication of nano-disk and nano-wire by fusion of bio-template and neutral beam etching

  • S. Samukawa, Shuichi Noda, Akio Higo, Manabu Yasuda, Kazumi Wada
  • November 2016, SPIE
  • DOI: 10.1117/12.2247702

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http://dx.doi.org/10.1117/12.2247702

The following have contributed to this page: Shuichi Noda