Spindle error motion measurement using concentric circle grating and sinusoidal frequency-modulated semiconductor lasers

  • Masato Higuchi, Thanh-Tung Vu, Masato Aketagawa
  • November 2016, SPIE
  • DOI: 10.1117/12.2246235

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http://dx.doi.org/10.1117/12.2246235