Three-dimensional surface inspection for semiconductor components with fringe projection profilometry

  • Fuqin Deng, Yi Ding, Kai Peng, Jiangtao Xi, Yongkai Yin, Ziqi Zhu
  • November 2016, SPIE
  • DOI: 10.1117/12.2246094

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http://dx.doi.org/10.1117/12.2246094