A blu-ray laser diode based dual-beam interference lithography for fabrication of diffraction gratings for surface encoders

  • Xiangwen Zhu, Xinghui Li, Qian Zhou, Xiaohao Wang, Kai Ni
  • November 2016, SPIE
  • DOI: 10.1117/12.2245710

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http://dx.doi.org/10.1117/12.2245710