Fabrication of EUVL micro-field exposure tools with 0.5 NA

  • Luc Girard, Lou Marchetti, Mark Bremer, Jim Kennon, Bob Kestner, Sam Hardy
  • October 2015, SPIE
  • DOI: 10.1117/12.2203138

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http://dx.doi.org/10.1117/12.2203138