Size effect study of thin film hardness using AFM nano-indentation

  • Linyan Xu, Shuangbei Qian, Juan Li, Congcong Liu, Shijia Guo, Di Huang, Sen Wu, Xiaodong Hu
  • October 2015, SPIE
  • DOI: 10.1117/12.2197572

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http://dx.doi.org/10.1117/12.2197572