Investigating deprotection-induced shrinkage and retro-grade sidewalls in NTD resists

Thomas V. Pistor, Chenchen Wang, Yan Wang, Lei Yuan, Jongwook Kye, Yixu Wu, Sohan Mehta, Paul Ackmann
  • March 2015, SPIE
  • DOI: 10.1117/12.2087376

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http://dx.doi.org/10.1117/12.2087376

The following have contributed to this page: Mr. Sohan S Mehta