Nano-electro-mechanical systems fabricated using tip-based nanofabrication

  • Huan Hu, Parsian K. Mohseni, Mark A. Shannon, Xiuling Li, William P. King
  • May 2013, SPIE
  • DOI: 10.1117/12.2015196

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http://dx.doi.org/10.1117/12.2015196

The following have contributed to this page: Dr Huan Hu