20nm VIA BEOL patterning challenges

Chien-Hsien S. Lee, Sohan Singh Mehta, Wontae Hwang, Hui Husan Tsai, Michael Anderson, Yayi Wei, Matthew Herrick, Xiang Hu, Bumhwan Jeon, Shyam Pal
  • March 2013, SPIE
  • DOI: 10.1117/12.2011843
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The following have contributed to this page: Mr. Sohan S Mehta