Double-meander spring silicon piezoresistive sensors as microforce calibration standards

Gerry Hamdana, Hutomo Suryo Wasisto, Lutz Doering, Chunlei Yan, Lei Zhou, Uwe Brand, Erwin Peiner
  • Optical Engineering, May 2016, SPIE
  • DOI: 10.1117/1.oe.55.9.091409

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http://dx.doi.org/10.1117/1.oe.55.9.091409