Fabrication of resonator–quantum well infrared photodetector focal plane array by inductively coupled plasma etching

  • Jason Sun, Kwong-Kit Choi
  • Optical Engineering, February 2016, SPIE
  • DOI: 10.1117/1.oe.55.2.026119

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http://dx.doi.org/10.1117/1.oe.55.2.026119