Accurate lithography hotspot detection using deep convolutional neural networks

  • Moojoon Shin, Jee-Hyong Lee
  • Journal of Micro/Nanolithography MEMS and MOEMS, November 2016, SPIE
  • DOI: 10.1117/1.jmm.15.4.043507

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http://dx.doi.org/10.1117/1.jmm.15.4.043507