Fabrication of three-dimensional silicon structure with smooth curved surfaces

  • Shengfeng Deng, Yulong Zhang, Shusen Jiang, Miao Lu
  • Journal of Micro/Nanolithography MEMS and MOEMS, August 2016, SPIE
  • DOI: 10.1117/1.jmm.15.3.034503

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http://dx.doi.org/10.1117/1.jmm.15.3.034503