Errata: Optimization of laser machining process for the preparation of photomasks, and its application to microsystems fabrication

  • Avinash Kumar, Ankur Gupta, Rishi Kant, Akhtar Syed Nadeem, Nachiketa Tiwari, Janakrajan Ramkumar, Shantanu Bhattacharya
  • Journal of Micro/Nanolithography MEMS and MOEMS, January 2014, SPIE
  • DOI: 10.1117/1.jmm.13.1.019801

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http://dx.doi.org/10.1117/1.jmm.13.1.019801