Influence of ion mixing on the depth resolution of sputter depth profiling

  • Yang‐Tse Cheng, Audrey A. Dow, Bruce M. Clemens, Eun‐Hee Cirlin
  • Journal of Vacuum Science & Technology A Vacuum Surfaces and Films, May 1989, American Vacuum Society
  • DOI: 10.1116/1.576064

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