Fabrication of tapered graded-refractive-index micropillars using ion-implanted-photoresist as an etch mask

  • Ming Ma, E. Fred Schubert, Jaehee Cho, Morgan Evans, Gi Bum Kim, Cheolsoo Sone
  • Journal of Vacuum Science & Technology A Vacuum Surfaces and Films, March 2014, American Vacuum Society
  • DOI: 10.1116/1.4862547

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http://dx.doi.org/10.1116/1.4862547

The following have contributed to this page: Professor Jaehee Cho