Fabrication of arbitrarily shaped silicon and silicon oxide nanostructures using tip-based nanofabrication

  • Huan Hu, Parsian K. Mohseni, Lei Pan, Xiuling Li, Suhas Somnath, Jonathan R. Felts, Mark A. Shannon, William P. King
  • Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena, January 2013, American Vacuum Society
  • DOI: 10.1116/1.4831767

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http://dx.doi.org/10.1116/1.4831767

The following have contributed to this page: Dr Huan Hu