Effect of trimethylsilane pressure on hot-wire chemical vapor deposition chemistry using vacuum ultraviolet laser ionization mass spectrometry

Rim Toukabri, Yujun Shi
  • Journal of Vacuum Science & Technology A Vacuum Surfaces and Films, January 2013, American Vacuum Society
  • DOI: 10.1116/1.4825105

The authors haven't finished explaining this publication. If you are the author, sign in to claim or explain your work.

Read Publication

http://dx.doi.org/10.1116/1.4825105

The following have contributed to this page: Yujun Shi