Effect of trimethylsilane pressure on hot-wire chemical vapor deposition chemistry using vacuum ultraviolet laser ionization mass spectrometry

Rim Toukabri, Yujun Shi
  • Journal of Vacuum Science & Technology A Vacuum Surfaces and Films, January 2013, American Vacuum Society
  • DOI: 10.1116/1.4825105

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The following have contributed to this page: Yujun Shi