Proximity error correction method for continuous moving stage electron beam writing

Sachin Kasture, Nikesh V. V., Gajendra Mulay, Achanta Venu Gopal
  • Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena, September 2012, American Vacuum Society
  • DOI: 10.1116/1.4746259

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