Nanoscratch testing of atomic layer deposition and magnetron sputtered TiO2 and Al2O3 coatings on polymeric substrates

  • Tommi O. Kääriäinen, Peter J. Kelly, David C. Cameron, Ben Beake, Heqing Li, Paul M. Barker, Carolin F. Struller
  • Journal of Vacuum Science & Technology A Vacuum Surfaces and Films, January 2012, American Vacuum Society
  • DOI: 10.1116/1.3665418

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